Catalogue › Semiconductor & Electronics Materials › CMP Slurries, Pads, Conditioners & Cleaning Materials
Semiconductor & Electronics Materials

CMP Slurries, Pads, Conditioners & Cleaning Materials

Chemical-mechanical planarization consumables and post-CMP cleaning materials for controlled removal, uniformity and defect performance.

Who this is for
  • Semiconductor fabs
  • Advanced packaging lines
  • Research cleanrooms
  • Process-development teams
Outcomes it serves
  • Process-matched planarization materials
  • Controlled removal and defect targets
  • Lot and shelf-life traceability
  • Structured sample-to-production qualification
Capabilities
  • Oxide, metal and specialty slurries
  • CMP pads and sub-pads
  • Diamond conditioners
  • Post-CMP cleaners
  • Filtration and point-of-use consumables
  • Sample, process trial and supplier qualification support
What is delivered
  • Approved technical specification and quotation
  • Qualified supplier/manufacturer record
  • Certificate of Analysis and lot/heat/batch traceability
  • Safety Data Sheet when applicable
  • Origin, export/end-use and compliance documents
  • Packaging, shipping, receiving and storage instructions
Options
  • Evaluation kit
  • Engineering lot
  • Production supply
  • Custom slurry matching
  • Pad and conditioner bundle
What may change the price
  • Exact grade, purity and technical tolerances
  • Quantity, minimum order and packaging
  • Availability, qualification sample and lead time
  • Incoterm, freight, hazmat and insurance
  • Origin, export, end-use and compliance requirements
  • Currency, price validity and payment risk

Content on this page comes from the governed ARRIX catalogue record MAT-06; pricing is confirmed only through a reviewed quotation.

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